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Simulation and characterization on properties of AlN films for SOI application

Thin solid films, 2004-07, Vol.459 (1), p.41-47

2004

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Photoresist-free fabrication process for a-Si:H thin film transistors

Journal of non-crystalline solids, 1998-01, Vol.227, p.1217-1220

1998

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Thin boron doped microcrystalline silicon films

Solar energy materials and solar cells, 1993, Vol.30 (2), p.139-145

1993

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Via hole technology for thin-film transistor circuits

IEEE electron device letters, 1997-11, Vol.18 (11), p.523-525

1997

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Electrophotographic patterning of thin-film silicon on glass foil

IEEE electron device letters, 1995-10, Vol.16 (10), p.418-420

1995

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Studies on the toxic effects of pentachlorophenol on the biological activity of anaerobic granular sludge

Journal of environmental management, 2008-09, Vol.88 (4), p.939-946

2008

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Dielectric properties of AlN thin films formed by ion beam enhanced deposition

Materials letters, 2003-12, Vol.57 (30), p.4643-4647

2003

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Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by conducting atomic force microscopy (C-AFM)

Thin solid films, 2004-07, Vol.459 (1), p.58-62

2004

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Spectroscopic ellipsometry chraracterization of the interfacial roughness in simox wafers

Thin solid films, 2004-07, Vol.459 (1), p.63-66

2004

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Steady state and transient transport in a-Si, Ge : H, F alloys

Journal of non-crystalline solids, 1987-12, Vol.97, p.1023-1026

1987

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Carrier transport mechanisms in a-Si:H,F/a-Si,Ge:H,F superlattices

Journal of non-crystalline solids, 1987-12, Vol.97, p.939-942

1987

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Characterization of nano-sized Si islands in buried oxide layer of SIMOX by conducting AFM

Chemical physics letters, 2003-07, Vol.376 (5), p.748-752

2003

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Modeling of gate line delay in very large active matrix liquid crystal displays

IEEE transactions on electron devices, 1998-01, Vol.45 (1), p.343-345

1998

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High-deposition-rate amorphous silicon solar cells: silane or disilane?

Solar cells, 1991, Vol.30 (1), p.271-275

1991

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Transient opto-electric response in hydrogenated amorphous silicon and implications for high speed sensor devices

Proceedings of 4th International Conference on Solid-State and IC Technology, 1995, p.718-720

Shen, D.S.

1995

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Ion implantation in polycrystalline silicon thin film transistors

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1993-04, Vol.74 (1), p.113-117

1993

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Amorphous silicon-germanium thin-film photodetector array

IEEE electron device letters, 1992-01, Vol.13 (1), p.5-7

1992

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Improving tunneling junction in amorphous silicon tandem solar cells

Applied physics letters, 1990-05, Vol.56 (19), p.1871-1873

1990

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Integrated amorphous silicon photoconductive type image sensor

Proceedings IEEE Southeastcon '92, 1992, p.358-362 vol.1

1992

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Bulk and surface properties of amorphous hydrogenated fluorinated silicon grown from SiF/sub 4/ and H/sub 2

IEEE transactions on electron devices, 1989-12, Vol.36 (12), p.2853-2858

1989

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Ion implantation in polycrystalline silicon thin film transistors

Ion Implantation Technology - 92, 1993, p.113-117

1993

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Electrophotographic patterning of a-Si:H

Proceedings of Second International Workshop on Active Matrix Liquid Crystal Displays, 1995, p.16-19

1995

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Transport properties of α-Si, Ge:H alloys prepared from SiF 4, GeF 4 and H 2 in R.F. or D.C. Glow discharges

Journal of non-crystalline solids, 1985, Vol.77, p.897-900

1985

Volltextzugriff (PDF)

Transport properties of α-Si, Ge:H alloys prepared from SiF4, GeF4 and H2 in R.F. or D.C. Glow discharges

Journal of non-crystalline solids, 1985-12, Vol.77-78, p.897-900

1985

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Interface of amorphous silicon thin film sensor with A/D converter

Proceedings of Southeastcon '93, 1993, p.4 p.

1993

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Simulation and characterization on properties of AlN films for SOI application

Photoresist-free fabrication process for a-Si:H thin film transistors

Thin boron doped microcrystalline silicon films

Via hole technology for thin-film transistor circuits

Electrophotographic patterning of thin-film silicon on glass foil

Studies on the toxic effects of pentachlorophenol on the biological activity of anaerobic granular sludge

Dielectric properties of AlN thin films formed by ion beam enhanced deposition

Electrical properties and microstructure of buried oxide (BOX) of SIMOX studied by conducting atomic force microscopy (C-AFM)

Spectroscopic ellipsometry chraracterization of the interfacial roughness in simox wafers

Steady state and transient transport in a-Si, Ge : H, F alloys

Carrier transport mechanisms in a-Si:H,F/a-Si,Ge:H,F superlattices

Characterization of nano-sized Si islands in buried oxide layer of SIMOX by conducting AFM

Modeling of gate line delay in very large active matrix liquid crystal displays

High-deposition-rate amorphous silicon solar cells: silane or disilane?

Transient opto-electric response in hydrogenated amorphous silicon and implications for high speed sensor devices

Ion implantation in polycrystalline silicon thin film transistors

Amorphous silicon-germanium thin-film photodetector array

Improving tunneling junction in amorphous silicon tandem solar cells

Integrated amorphous silicon photoconductive type image sensor

Bulk and surface properties of amorphous hydrogenated fluorinated silicon grown from SiF/sub 4/ and H/sub 2

Ion implantation in polycrystalline silicon thin film transistors

Electrophotographic patterning of a-Si:H

Transport properties of α-Si, Ge:H alloys prepared from SiF 4, GeF 4 and H 2 in R.F. or D.C. Glow discharges

Transport properties of α-Si, Ge:H alloys prepared from SiF4, GeF4 and H2 in R.F. or D.C. Glow discharges

Interface of amorphous silicon thin film sensor with A/D converter

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