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Large-Scale Delayering of Semiconductor Devices with Nanometer-Scale Uniformity over a Millimeter-Scale Area

Journal of failure analysis and prevention, 2024-10, Vol.24 (5), p.2174-2183

2024

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Elucidating Surface Properties by Correlative TEM and APT Studies of Ideal Mg Specimens Prepared Under Controlled Environments

Microscopy and microanalysis, 2023-07, Vol.29 (Supplement_1), p.2073-2074

2023

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Artifact-Free Preparation of Plan View TEM Specimens and Its Application to MRAM Devices

Microscopy and microanalysis, 2023-07, Vol.29 (Supplement_1), p.105-106

2023

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Argon Milling of Bulk and Post-FIB Specimens for Multi-Length Scale Analyses by EBSD, TEM, and APT under Controlled Environments

Microscopy and microanalysis, 2022-08, Vol.28 (S1), p.3176-3178

2022

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Site-specific Sample Preparation by Concentrated Ar Ion Milling for Post-mortem Atomic Resolution Imaging of Rapidly Solidified Al-Cu Thin Films After Pulsed Laser Melting

Microscopy and microanalysis, 2022-08, Vol.28 (S1), p.124-125

2022

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Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens

Microscopy and microanalysis, 2022-08, Vol.28 (S1), p.52-53

2022

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SEM and TEM characterization of plastic deformation structures in Aluminum by EBSD, TKD, and PED-based orientation imaging techniques

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.2182-2183

2018

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Investigation of the Effects of Low-Energy Plasma Treatment on Amorphous Carbon and Graphene Support Films for Cryo-Electron Microscopy

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.996-997

2019

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Precession technique and electron diffractometry as new tools for crystal structure analysis and chemical bonding determination

Ultramicroscopy, 2007-06, Vol.107 (6), p.431-444

2007

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Investigations on the Microstructure and Microanalysis of the Gas Shale Sample Prepared by SEM Ion Mill by Off-Centering the Ion Beams

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.2108-2109

2014

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Wave-induced dynamic pressure under rubble mound breakwaters with submerged berm: an experimental and numerical study

Coastal engineering (Amsterdam), 2021-12, Vol.170, p.104014, Article 104014

2021

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Characterization of Shales by Mass Spectrometry during Ion Milling

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.1724-1725

2014

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Towards Quantitative 3D Chemical Analysis in TEM Using Quadrant XEDS Detector Geometry

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.762-763

2014

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Latest Developments in Post-FIB Concentrated Ar Ion Beam Milling of TEM Specimens with Large Electron-transparent Areas

Microscopy and microanalysis, 2024-07, Vol.30 (Supplement_1)

2024

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Chasing Down Leads: Imaging Conductivity Networks in a FinFET Processor

Microscopy and microanalysis, 2024-07, Vol.30 (Supplement_1)

2024

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TEM Preparation and Characterization of a GeTe-based Phase Change Memory Device at Partial SET Mode

Microscopy and microanalysis, 2024-07, Vol.30 (Supplement_1)

2024

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TEM Specimen Preparation for STEM-EBIC Analysis of Advanced Semiconductor Devices

Microscopy and microanalysis, 2024-07, Vol.30 (Supplement_1)

2024

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Delayering of Microelectronic Devices Using an Adjustable Broad-Beam Ion Source

Journal of physics. Conference series, 2013-01, Vol.471 (1), p.12046-4

2013

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Turbulent bulk viscosity

European journal of mechanics, B, Fluids, 2020-11, Vol.84, p.446-454

2020

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Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.862-863

2018

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Controlled Environments from Sample Preparation to Electron Microscopy Characterization

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.698-699

2019

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Post-FIB Specimen Preparation of Atom Probe Specimens under Controlled Environments for Correlative Microscopy

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.2554-2555

2019

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Sample Preparation for Aberration Corrected Microscopy

Microscopy and microanalysis, 2008-08, Vol.14 (S2), p.998-999

2008

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Sample preparation for aberration-corrected microscopy of high-quality TEM specimens of advanced integrated circuits

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.150-151

2018

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Automatic End-point Detection for Ar+ Milling of FIB in situ and ex situ Lift-out Specimens from Semiconductor Devices

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.854-855

2018

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Large-Scale Delayering of Semiconductor Devices with Nanometer-Scale Uniformity over a Millimeter-Scale Area

Elucidating Surface Properties by Correlative TEM and APT Studies of Ideal Mg Specimens Prepared Under Controlled Environments

Artifact-Free Preparation of Plan View TEM Specimens and Its Application to MRAM Devices

Argon Milling of Bulk and Post-FIB Specimens for Multi-Length Scale Analyses by EBSD, TEM, and APT under Controlled Environments

Site-specific Sample Preparation by Concentrated Ar Ion Milling for Post-mortem Atomic Resolution Imaging of Rapidly Solidified Al-Cu Thin Films After Pulsed Laser Melting

Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens

SEM and TEM characterization of plastic deformation structures in Aluminum by EBSD, TKD, and PED-based orientation imaging techniques

Investigation of the Effects of Low-Energy Plasma Treatment on Amorphous Carbon and Graphene Support Films for Cryo-Electron Microscopy

Precession technique and electron diffractometry as new tools for crystal structure analysis and chemical bonding determination

Investigations on the Microstructure and Microanalysis of the Gas Shale Sample Prepared by SEM Ion Mill by Off-Centering the Ion Beams

Wave-induced dynamic pressure under rubble mound breakwaters with submerged berm: an experimental and numerical study

Characterization of Shales by Mass Spectrometry during Ion Milling

Towards Quantitative 3D Chemical Analysis in TEM Using Quadrant XEDS Detector Geometry

Latest Developments in Post-FIB Concentrated Ar Ion Beam Milling of TEM Specimens with Large Electron-transparent Areas

Chasing Down Leads: Imaging Conductivity Networks in a FinFET Processor

TEM Preparation and Characterization of a GeTe-based Phase Change Memory Device at Partial SET Mode

TEM Specimen Preparation for STEM-EBIC Analysis of Advanced Semiconductor Devices

Delayering of Microelectronic Devices Using an Adjustable Broad-Beam Ion Source

Turbulent bulk viscosity

Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

Controlled Environments from Sample Preparation to Electron Microscopy Characterization

Post-FIB Specimen Preparation of Atom Probe Specimens under Controlled Environments for Correlative Microscopy

Sample Preparation for Aberration Corrected Microscopy

Sample preparation for aberration-corrected microscopy of high-quality TEM specimens of advanced integrated circuits

Automatic End-point Detection for Ar+ Milling of FIB in situ and ex situ Lift-out Specimens from Semiconductor Devices

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