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Electrolytically Ionized Abrasive-Free CMP (EAF-CMP) for Copper

Applied sciences, 2021-08, Vol.11 (16), p.7232

2021

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Enhanced optomechanical properties of mechanochemiluminescent poly(methyl acrylate) composites with granulated fluorescent conjugated microporous polymer fillers† †Electronic supplementary information (ESI) available: Experimental procedures, characterization data for granulated CMPs, CMP/PMA composites, optomechanical test results of CMP/PMA and mechanochemiluminescent videos of CMP/PMA films during stretching. See DOI: 10.1039/c8sc04701d

Chemical science (Cambridge), 2018-12, Vol.10 (7), p.2206-2211

2018

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Polishing Mechanism of CMP 4H-SiC Crystal Substrate (0001) Si Surface Based on an Alumina ( Al 2 O 3 ) Abrasive

Materials, 2024-01, Vol.17 (3), p.679

2024

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Investigation on the substrate specificity and N -substitution tolerance of PseF in catalytic transformation of pseudaminic acids to CMP-Pse derivatives

Chemical science (Cambridge), 2024-04, Vol.15 (16), p.5950-5956

2024

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Temperature-controlled electrospray ionization mass spectrometry as a tool to study collagen homo- and heterotrimers† †The data used in this publication are freely accessible in a curated data archive at ETH Zurich (https://www.research-collection.ethz.ch) under the DOI: 10.3929/ethz-b-000319305 ‡ ‡Electronic supplementary information (ESI) available: CD spectroscopy scans and thermal denaturation profiles of CMP A and mixtures of CMP B–F (S1, S2). Native MS spectra of different mixtures of CMP

Chemical science (Cambridge), 2019-09, Vol.10 (42), p.9829-9835

2019

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Effect of ethylenediamine on CMP performance of ruthenium in H2O2-based slurries

RSC advances, 2021-12, Vol.12 (1), p.228-240

2021

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Environmentally benign pH-responsive cytidine-5′-monophosphate molecule-mediated akaganeite (5′-CMP-β-FeOOH) soft supramolecular hydrogels induced by the puckering of ribose sugar with efficient loading/release capabilities

New journal of chemistry, 2019-09, Vol.43 (37), p.14997-1513

2019

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Contact-Area-Changeable CMP Conditioning for Enhancing Pad Lifetime

Applied sciences, 2021-04, Vol.11 (8), p.3521

2021

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CMP Pad Conditioning Using the High-Pressure Micro-Jet Method

Micromachines (Basel), 2023-01, Vol.14 (1), p.200

2023

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Multistimulus-Responsive Supramolecular Hydrogels Derived by in situ Coating of Ag Nanoparticles on 5′-CMP-Capped β-FeOOH Binary Nanohybrids with Multifunctional Features and Applications

ACS omega, 2020-06, Vol.5 (23), p.13672-13684

2020

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Novel Insights into Selected Disease-Causing Mutations within the SLC35A1 Gene Encoding the CMP-Sialic Acid Transporter

International journal of molecular sciences, 2020-12, Vol.22 (1), p.304

2020

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Hybrid CMP Slurry Supply System Using Ionization and Atomization

Applied sciences, 2021-03, Vol.11 (5), p.2217

2021

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Bioremoval of Cu2+ from CMP wastewater by a novel copper-resistant bacterium Cupriavidus gilardii CR3: characteristics and mechanisms

RSC advances, 2017-03, Vol.7 (30), p.18793-18802

2017

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Polystyrene core-silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

RSC advances, 2017-01, Vol.7 (11), p.6548-6558

2017

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Ultrasensitive Electrical Detection of Hemagglutinin for Point-of-Care Detection of Influenza Virus Based on a CMP-NANA Probe and Top-Down Processed Silicon Nanowire Field-Effect Transistors

Sensors (Basel, Switzerland), 2019-10, Vol.19 (20), p.4502

2019

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Optimization of Graphical Parameter Extraction Algorithm for Chip-Level CMP Prediction Model Based on Effective Planarization Length

Micromachines (Basel), 2024-04, Vol.15 (4), p.549

2024

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Fluorosurfactants‐Directed Preparation of Homogeneous and Hierarchical‐Porosity CMP Aerogels for Gas Sorption and Oil Cleanup

Advanced science, 2015-02, Vol.2 (1-2), p.1400006-n/a

2015

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Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304)

Micromachines (Basel), 2020-07, Vol.11 (7), p.705

2020

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Investigation of the Two-Way Injection Slurry-Supply Method for the Cu CMP Process

Applied sciences, 2023-03, Vol.13 (6), p.3758

2023

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Feasible bottom-up development of conjugated microporous polymers (CMPs) for boosting the deep removal of sulfur dioxide

Chemical science (Cambridge), 2023-08, Vol.14 (31), p.8321-8326

2023

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Binding of regulatory subunits of cyclic AMP-dependent protein kinase to cyclic CMP agarose

PloS one, 2012-07, Vol.7 (7), p.e39848-e39848

2012

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Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP

RSC advances, 2015-01, Vol.5 (12), p.8456-8465

2015

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Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements

Micromachines (Basel), 2018-10, Vol.9 (11), p.542

2018

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Molecular Interactions of the Polysialytransferase Domain (PSTD) in ST8Sia IV with CMP-Sialic Acid and Polysialic Acid Required for Polysialylation of the Neural Cell Adhesion Molecule Proteins: An NMR Study

International journal of molecular sciences, 2020-02, Vol.21 (5), p.1590

2020

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Silicon Wafer CMP Slurry Using a Hydrolysis Reaction Accelerator with an Amine Functional Group Remarkably Enhances Polishing Rate

Nanomaterials (Basel, Switzerland), 2022-11, Vol.12 (21), p.3893

2022

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Electrolytically Ionized Abrasive-Free CMP (EAF-CMP) for Copper

Polishing Mechanism of CMP 4H-SiC Crystal Substrate (0001) Si Surface Based on an Alumina ( Al 2 O 3 ) Abrasive

Investigation on the substrate specificity and N -substitution tolerance of PseF in catalytic transformation of pseudaminic acids to CMP-Pse derivatives

Effect of ethylenediamine on CMP performance of ruthenium in H2O2-based slurries

Environmentally benign pH-responsive cytidine-5′-monophosphate molecule-mediated akaganeite (5′-CMP-β-FeOOH) soft supramolecular hydrogels induced by the puckering of ribose sugar with efficient loading/release capabilities

Contact-Area-Changeable CMP Conditioning for Enhancing Pad Lifetime

CMP Pad Conditioning Using the High-Pressure Micro-Jet Method

Multistimulus-Responsive Supramolecular Hydrogels Derived by in situ Coating of Ag Nanoparticles on 5′-CMP-Capped β-FeOOH Binary Nanohybrids with Multifunctional Features and Applications

Novel Insights into Selected Disease-Causing Mutations within the SLC35A1 Gene Encoding the CMP-Sialic Acid Transporter

Hybrid CMP Slurry Supply System Using Ionization and Atomization

Bioremoval of Cu2+ from CMP wastewater by a novel copper-resistant bacterium Cupriavidus gilardii CR3: characteristics and mechanisms

Polystyrene core-silica shell composite particles: effect of mesoporous shell structures on oxide CMP and mechanical stability

Ultrasensitive Electrical Detection of Hemagglutinin for Point-of-Care Detection of Influenza Virus Based on a CMP-NANA Probe and Top-Down Processed Silicon Nanowire Field-Effect Transistors

Optimization of Graphical Parameter Extraction Algorithm for Chip-Level CMP Prediction Model Based on Effective Planarization Length

Fluorosurfactants‐Directed Preparation of Homogeneous and Hierarchical‐Porosity CMP Aerogels for Gas Sorption and Oil Cleanup

Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304)

Investigation of the Two-Way Injection Slurry-Supply Method for the Cu CMP Process

Feasible bottom-up development of conjugated microporous polymers (CMPs) for boosting the deep removal of sulfur dioxide

Binding of regulatory subunits of cyclic AMP-dependent protein kinase to cyclic CMP agarose

Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP

Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements

Molecular Interactions of the Polysialytransferase Domain (PSTD) in ST8Sia IV with CMP-Sialic Acid and Polysialic Acid Required for Polysialylation of the Neural Cell Adhesion Molecule Proteins: An NMR Study

Silicon Wafer CMP Slurry Using a Hydrolysis Reaction Accelerator with an Amine Functional Group Remarkably Enhances Polishing Rate

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