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MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Interpretation of complex x-ray photoelectron peak shapes. II. Case study of Fe 2p3/2 fitting applied to austenitic stainless steels 316 and 304

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Interpretation of complex x-ray photoelectron peak shapes. I. Case study of Fe 2p3/2 spectra

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Revealing the controlling mechanisms of atomic layer etching for high-k dielectrics in conventional inductively coupled plasma etching tool

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Nanomultilayer gradation strategy to improve mechanical properties of TiSiN/AlCrN hard coatings

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Effect of plasma discharge pulse length for GaN film crystallinity on sapphire substrate by high density convergent plasma sputtering device

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Switching of kV-class Ga2O3 heterojunction vertical rectifiers

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Impact of sputtering and redeposition on the morphological profile evolution during ion-beam etching of blazed gratings

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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MOS structure with as-deposited ALD Al2O3/4H-SiC heterostructure with high electrical performance: Investigation of the interfacial region

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Guided combinatorial synthesis and automated characterization expedites the discovery of hard, electrically conductive PtxAu1−x films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Growth of high-quality ruthenium films on sapphire

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Molecular beam epitaxy of Pd-Fe graded alloy films for standing spin waves control

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Influence of high-temperature thermal annealing on paramagnetic point defects in silicon-rich silicon nitride films formed in a single-wafer-type low-pressure chemical vapor deposition reactor

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Nanostructured bi-metallic Pd–Ag alloy films for surface-enhanced Raman spectroscopy-based sensing application

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Immersion ellipsometry for the uncorrelated determination of ultrathin film thickness and index of refraction: Theory and examples

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Surface modification of Al-15Al2O3-0.3G powder metallurgical alloy induced by high-current pulsed electron beam

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Investigation of capacitance for InAs/GaAs quantum dot solar cells by photoreflectance

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Role of the magnetic layer interface, roughness, and thickness in the temperature-dependent magnetic properties of Al2O3/Co/CoO thin films deposited by magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Amine plasma polymers deposited on porous hydroxyapatite artificial bone with bipolar pulsed discharges

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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First-principles calculations on adsorption-diffusion behavior of transition layer Ti atoms on the Fe surface

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Fracture strain improving via structural austenitic stainless steel-coated 22MnB5 plates

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Inhibition of thermochemical erosion by different coatings attached to the barrel chamber at high temperature and supersonic environments

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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Enhanced nucleation mechanism in ruthenium atomic layer deposition: Exploring surface termination and precursor ligand effects with RuCpEt(CO)2

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-09, Vol.42 (5)

2024

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