Details

Autor(en) / Beteiligte

• Karlsson, M.
• Nikolajeff, F.
• Vukusic, J.
• Martinsson, H.
• Bengtsson, J.
• Larsson, A.

Titel

Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers

Ist Teil von

• IEEE photonics technology letters, 2003-03, Vol.15 (3), p.359-361

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2003

Link zum Volltext

• IEEE_Xplore

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.