Details

Autor(en) / Beteiligte

• Yan, Peinan
• Gu, Guoying
• Zou, Jiang
• Zou, Jun
• Yang, Huayong
• Yin, Zhouping
• Ouyang, Xiaoping
• Yang, Geng
• Wang, Zhiyong
• Liu, Honghai
• Liu, Lianqing

Titel

Design, Modeling and Control of a Dielectric Elastomer Actuated Micro-positioning Stage

Ist Teil von

• Intelligent Robotics and Applications, p.174-185

Ort / Verlag

Singapore: Springer Nature Singapore

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• In this paper, we propose one kind of a dielectric elastomer actuated micro-positioning stage (DEAMS) that can achieve both large stroke and high resolution. To this end, a customized multilayer dielectric elastomer actuator (DEA), made of silicone, is designed and fabricated, which can generate a linear movement. Then based on the DEA, a DEAMS is designed with a stroke of nearly 1 mm and resolution of 480 nm. Next, several dynamic tests are conducted to reveal its dynamic responses: i) the natural frequency of the DEAMS can reach 80 Hz; ii) its output displacement shows both slow-time creep and rate-dependent hysteresis because of the inherent viscoelasticity. Lastly, a direct inverse hysteresis compensation (DIHC) controller based on a phenomenological hysteresis model and a closed-loop controller are adopted to remove hysteresis and creep, respectively. Experimental results demonstrate that with our control method, the DEAMS can achieve high-precision tracking control, which may pave the way for its applications in the field of micro/nano manipulations.