Details

Autor(en) / Beteiligte

• Martin, Aiden A.
• Depond, Philip J.
• Bagge-Hansen, Michael
• Lee, Jonathan R. I.
• Yoo, Jae-Hyuck
• Elhadj, Selim
• Matthews, Manyalibo J.
• van Buuren, Tony

Titel

Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction

Ist Teil von

• Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-03, Vol.36 (2)

Ort / Verlag

United States: American Vacuum Society/AIP

Erscheinungsjahr

2018

Link zum Volltext

Quelle

美国小型学会期刊集（AIP Scitation平台）

Beschreibungen/Notizen

• An operando x-ray diffraction system is presented for elucidating optimal laser assisted chemical vapor deposition growth conditions. The technique is utilized to investigate deposition dynamics of boron-carbon materials using trimethyl borate precursor. Trimethyl borate exhibits vastly reduced toxicological and flammability hazards compared to existing precursors, but has previously not been applied to boron carbide growth. Crystalline boron-rich carbide material is produced in a narrow growth regime on addition of hydrogen during the growth phase at high temperature. The use of the operando x-ray diffraction system allows for the exploration of highly nonequilibrium conditions and rapid process control, which are not possible using ex situ diagnostics.