Details

Autor(en) / Beteiligte

• Zacheo, A
• Zizzari, A
• Perrone, E
• Carbone, L
• Giancane, G
• Valli, L
• Rinaldi, R
• Arima, V

Titel

Fast and safe microwave-assisted glass channel-shaped microstructure fabricationElectronic supplementary information (ESI) available: The ESI includes a discussion on the MW mechanisms, experimental details, additional results and figures. See DOI: 10.1039/c4lc01419g

Erscheinungsjahr

2015-06

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Glass micromachining is a basic technology to achieve microfluidic networks for lab-on-a-chip applications. Among several methods to microstructure glass, the simplest and most widely applied is wet chemical etching (WE). However, accurate control of the reaction conditions to perform reproducible, fast and safe glass etching is not straightforward. Herein, microwave-assisted WE is demonstrated to intensify the glass etching action under safe working and finely monitored operative conditions and to produce smooth deep channels in short processing times with reduced underetching effects. Microwave-assisted wet etching intensifies the glass etching action under safe working and finely monitored operative conditions and it produces smooth deep channels in short processing times with reduced underetching effects.