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As a new generation of non-volatile memory, phase change random access memory (PCRAM) has the potential to fill the hierarchical gap between DRAM and NAND FLASH in computer storage. Sb
Te
, one of the candidate materials for high-speed PCRAM, has high crystallization speed and poor thermal stability. In this work, we investigated the effect of carbon doping on Sb
Te
. It was found that the FCC phase of C-doped Sb
Te
appeared at 200 °C and began to transform into the HEX phase at 25 °C, which is different from the previous reports where no FCC phase was observed in C-Sb
Te
. Based on the experimental observation and first-principles density functional theory calculation, it is found that the formation energy of FCC-Sb
Te
structure decreases gradually with the increase in C doping concentration. Moreover, doped C atoms tend to form C molecular clusters in sp
hybridization at the grain boundary of Sb
Te
, which is similar to the layered structure of graphite. And after doping C atoms, the thermal stability of Sb
Te
is improved. We have fabricated the PCRAM device cell array of a C-Sb
Te
alloy, which has an operating speed of 5 ns, a high thermal stability (10-year data retention temperature 138.1 °C), a low device power consumption (0.57 pJ), a continuously adjustable resistance value, and a very low resistance drift coefficient.
Sprache
Englisch
Identifikatoren
ISSN: 2079-4991
eISSN: 2079-4991
Titel-ID: cdi_pubmed_primary_36839039
Format
–
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