Details

Autor(en) / Beteiligte

• Zara, J M
• Yazdanfar, S
• Rao, K D
• Izatt, J A
• Smith, S W

Titel

Electrostatic micromachine scanning mirror for optical coherence tomography

Ist Teil von

• Optics letters, 2003-04, Vol.28 (8), p.628

Ort / Verlag

United States

Erscheinungsjahr

2003

Quelle

MEDLINE

Beschreibungen/Notizen

• Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.