Details

Autor(en) / Beteiligte

• Hao, Liu
• Songlin, Chen
• Yaowei, Wei
• Zhe, Zhang
• Jin, Luo
• Nan, Zheng
• Ping, Ma

Titel

Laser conditioning on HfO2 film monitored by calorimeter

Ist Teil von

• Optics express, 2012-01, Vol.20 (1), p.698-705

Ort / Verlag

United States

Erscheinungsjahr

2012

Quelle

Free E-Journal (出版社公開部分のみ）

Beschreibungen/Notizen

• Conditioning effect on HfO2 single-layer film by quasi-cw laser was investigated. The conditioning process was monitored with laser calorimeter. Experimental results revealed that the HfO2 film absorption decreased as a function of the irradiation dose. Higher laser power accelerated the conditioning process. The conditioning effect could not be explained by water annihilation. AFM pictures of the film surface showed that the structural information in the conditioned region was different from the unconditioned region. Monitoring the in situ absorption, laser calorimeter is a promising tool to investigate the laser conditioning process.