Nano letters, 2012-01, Vol.12 (1), p.161-166
2012
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Details
- Autor(en) / Beteiligte
- Titel
- Synthesis of Monolayer Hexagonal Boron Nitride on Cu Foil Using Chemical Vapor Deposition
- Ist Teil von
- Nano letters, 2012-01, Vol.12 (1), p.161-166
- Ort / Verlag
- Washington, DC: American Chemical Society
- Erscheinungsjahr
- 2012
- Quelle
- MEDLINE
- Beschreibungen/Notizen
- Hexagonal boron nitride (h-BN) is very attractive for many applications, particularly, as protective coating, dielectric layer/substrate, transparent membrane, or deep ultraviolet emitter. In this work, we carried out a detailed investigation of h-BN synthesis on Cu substrate using chemical vapor deposition (CVD) with two heating zones under low pressure (LP). Previous atmospheric pressure (AP) CVD syntheses were only able to obtain few layer h-BN without a good control on the number of layers. In contrast, under LPCVD growth, monolayer h-BN was synthesized and time-dependent growth was investigated. It was also observed that the morphology of the Cu surface affects the location and density of the h-BN nucleation. Ammonia borane is used as a BN precursor, which is easily accessible and more stable under ambient conditions than borazine. The h-BN films are characterized by atomic force microscopy, transmission electron microscopy, and electron energy loss spectroscopy analyses. Our results suggest that the growth here occurs via surface-mediated growth, which is similar to graphene growth on Cu under low pressure. These atomically thin layers are particularly attractive for use as atomic membranes or dielectric layers/substrates for graphene devices.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 1530-6984eISSN: 1530-6992DOI: 10.1021/nl203249aTitel-ID: cdi_proquest_miscellaneous_915633233
- Format
- –
- Schlagworte
- Boron Compounds - chemistry, Boron nitride, Chemical vapor deposition, Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.), Condensed matter: electronic structure, electrical, magnetic, and optical properties, Condensed matter: structure, mechanical and thermal properties, Copper, Copper - chemistry, Cross-disciplinary physics: materials science, rheology, Crystallization - methods, Density, Dielectric thin films, Dielectrics, Dielectrics, piezoelectrics, and ferroelectrics and their properties, Equations of state, phase equilibria, and phase transitions, Exact sciences and technology, Gases - chemistry, General studies of phase transitions, Graphene, Low pressure, Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties, Macromolecular Substances - chemistry, Materials science, Materials Testing, Membranes, Membranes, Artificial, Methods of deposition of films and coatings, film growth and epitaxy, Molecular Conformation, Nanostructures - chemistry, Nanostructures - ultrastructure, Nucleation, Particle Size, Physics, Surface Properties, Surfaces and interfaces, thin films and whiskers (structure and nonelectronic properties), Synthesis (chemistry)