Details

Autor(en) / Beteiligte

• Jones, C.D.W.
• Bolle, C.A.
• Ryf, R.
• Simon, M.E.
• Pardo, F.
• Aksyuk, V.A.
• Lai, W.Y.-C.
• Bower, J.E.
• Miner, J.F.
• Klemens, F.P.
• Cirelli, R.A.
• Sorsch, T.W.
• Ferry, E.J.
• Fetter, L.A.
• Pai, C.-S.
• Taylor, J.A.
• Vyas, B.
• Watson, G.P.
• Stekas, B.
• Baker, M.R.
• Papazian, A.R.
• Basavanhally, N.R.
• Mansfield, W.M.
• Kornblit, A.
• Keller, R.C.
• Gates, J.V.
• Ramirez, A.P.

Titel

MEMS thermal imager with optical readout

Ist Teil von

• Sensors and actuators. A. Physical., 2009-10, Vol.155 (1), p.47-57

Ort / Verlag

Elsevier B.V

Erscheinungsjahr

2009

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• A cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference. A series of small arrays (approximately 100 × 100 pixels) were fabricated using 8-in. silicon MEMS processes. The array design and process development will be discussed and initial uniformity and imaging results presented. Future challenges in developing a direct-view IR imager will be addressed.