Details

Autor(en) / Beteiligte

• Gierl, C
• Gruendl, T
• Debernardi, P
• Zogal, K
• Grasse, C
• Davani, H A
• Böhm, G
• Jatta, S
• Küppers, F
• Meissner, P
• Amann, M-C

Titel

Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning

Ist Teil von

• Optics express, 2011-08, Vol.19 (18), p.17336-17343

Ort / Verlag

United States

Erscheinungsjahr

2011

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).