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► We demonstrate GeO
x
RRAM with both cost-effective and ultra-low power. ► Hopping conduction mechanism effectively lowers switched currents. ► Self-compliance switched mode presents from penalties of excess forming current via filaments. ► Size-related switched power enables application of high-density memory.
We reported an ultra low-power resistive random access memory (RRAM) combining a low-cost Ni electrode and covalent-bond GeO
x
dielectric. This cost-effective Ni/GeO
x
/TaN RRAM device has very small set power of 2
μW, ultra-low reset power of 130
pW, greater than 1 order of magnitude resistance window, and stable retention at 85
°C. The current flow at low-resistance state is governed by Poole–Frenkel conduction with electrons hopping via defect traps, which is quite different from the filament conduction in metal-oxide RRAM.