Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.892-904
2009
Volltextzugriff (PDF)
Details
- Autor(en) / Beteiligte
- Titel
- A 2-DOF Circular-Resonator-Driven In-Plane Vibratory Grating Laser Scanner
- Ist Teil von
- Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.892-904
- Ort / Verlag
- New York, NY: IEEE
- Erscheinungsjahr
- 2009
- Quelle
- IEEE Xplore
- Beschreibungen/Notizen
- In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with those driven by a one-degree-of-freedom (1-DOF) comb-driven circular resonator or a 2-DOF electrical comb-driven lateral-to-rotational resonator. We have demonstrated that our prototype device, with a 1-mm-diameter diffraction grating is capable of scanning at 20.289 kHz with an optical scan angle of around 25 deg . A refined theoretical model with fewer assumptions is proposed, which can make the prediction of dynamic performance much more accurate.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 1057-7157eISSN: 1941-0158DOI: 10.1109/JMEMS.2009.2023844Titel-ID: cdi_proquest_miscellaneous_875031289
- Format
- –
- Schlagworte
- Diffraction grating, Diffraction gratings, Exact sciences and technology, High speed, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Laser applications, Laser modes, Lasers, Mathematical models, Mechanical instruments, equipment and techniques, micro-opto-electromechanical systems, Microelectromechanical systems, Micromechanical devices and systems, microresonators, microscanners, Optical design, Optical device fabrication, Optical diffraction, Optical resonators, Physics, Prototypes, Resonators, Scanners, Scanning, Vibration measurement