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Forming wrinkled stiff films on polymeric substrates at room temperature for stretchable interconnects applications
Ist Teil von
Thin solid films, 2010-11, Vol.519 (2), p.818-822
Ort / Verlag
Amsterdam: Elsevier B.V
Erscheinungsjahr
2010
Quelle
Access via ScienceDirect (Elsevier)
Beschreibungen/Notizen
Periodically wrinkled stiff thin films on elastomeric substrates have been found extensive applications, such as in stretchable electronics. This paper presents a cost-effective and simple method to form wrinkled stiff SiO
x
thin films on polydimethylsiloxane (PDMS) substrates at room temperature by ultraviolet/ozone (UV/O) radiation on pre-strained PDMS. Systemic studies have been conducted to understand the dependence of the wavy profile on the PDMS pre-strain, UV/O exposure time, and PDMS modulus. The mechanics analysis has been verified to be quantitatively or qualitatively accurate by experimental comparisons. The wrinkled SiO
x
/PDMS system is stretchable and provides a wavy mold for stretchable electrodes. The constant electrical resistance during mechanical stretching shows the stretchability of this system.