Thin solid films, 2010-06, Vol.518 (16), p.4508-4511
2010
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Details
- Autor(en) / Beteiligte
- Titel
- Structural characterization of sputtered indium oxide films deposited at room temperature
- Ist Teil von
- Thin solid films, 2010-06, Vol.518 (16), p.4508-4511
- Ort / Verlag
- Amsterdam: Elsevier B.V
- Erscheinungsjahr
- 2010
- Quelle
- Alma/SFX Local Collection
- Beschreibungen/Notizen
- Structural evolution of indium oxide thin films deposited at room temperature by reactive magnetron sputtering and annealing in a reducing atmosphere were investigated. The as deposited indium oxide (In 2O 3) films showed a dominating randomly oriented nanocrystalline structure of cubic In 2O 3. The grain size decreased with increasing oxygen concentration in the plasma. Annealing in reducing atmospheres (vacuum, nitrogen and argon), besides improving the crystallinity, led to a partial cubic to rhombohedral phase transition in the indium oxide films. Annealing improved the optical properties of the indium oxide film and shifted the absorption edge to higher energies.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0040-6090eISSN: 1879-2731DOI: 10.1016/j.tsf.2009.12.018Titel-ID: cdi_proquest_miscellaneous_787202493
- Format
- –
- Schlagworte
- Annealing, Condensed matter: electronic structure, electrical, magnetic, and optical properties, Condensed matter: structure, mechanical and thermal properties, Cross-disciplinary physics: materials science, rheology, Crystallinity, Cubic indium oxide, Deposition, Deposition by sputtering, Evolution, Exact sciences and technology, Grain size, Indium oxides, Materials science, Methods of deposition of films and coatings, film growth and epitaxy, Nanoscale materials and structures: fabrication and characterization, Optical properties, Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation, Optical properties of specific thin films, Other topics in nanoscale materials and structures, Physics, Reactive sputter deposition, Reducing atmospheres, Rhombohedral indium oxide, Structure, Structure and morphology, thickness, Surfaces and interfaces, thin films and whiskers (structure and nonelectronic properties), Thin film structure and morphology, Thin films