Details

Autor(en) / Beteiligte

• Rotich, S K
• Smith, J G
• Evans, A G R
• Brunnschweiler, A

Titel

Photoresist parabolas for curved micromirrors

Ist Teil von

• Journal of micromechanics and microengineering, 1998-06, Vol.8 (2), p.108-110, Article 108

Ort / Verlag

Bristol: IOP Publishing

Erscheinungsjahr

1998

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Microscopic parabolic surfaces have been fabricated in thick positive photoresist by exposing it using a suitably designed mask on an X5 stepper projection reduction system. The resulting cylindrical parabolic surfaces were coated with reflective material to form parabolic micromirrors. Measurement results of focal length are in agreement with the expected theoretical values. The devices form the basis for the fabrication of compound parabolic microreflectors which are very suitable for thin solar cells.