Details

Autor(en) / Beteiligte

• Hatzor, A.
• Weiss, P. S.

Titel

Molecular Rulers for Scaling down Nanostructures

Ist Teil von

• Science (American Association for the Advancement of Science), 2001-02, Vol.291 (5506), p.1019-1020

Ort / Verlag

Washington, DC: American Society for the Advancement of Science

Erscheinungsjahr

2001

Quelle

Science Online_科学在线

Beschreibungen/Notizen

• A method of constructing <30-nanometer structures in close proximity with precise spacings is presented that uses the step-by-step application of organic molecules and metal ions as size-controlled resists on predetermined patterns, such as those formed by electron-beam lithography. The organic molecules serve as a ruler for scaling down a larger "parent" structure. After metal deposition and lift-off of the organic multilayer resist, an isolated smaller structure remains on the surface. This approach is used to form thin parallel wires (15 to 70 nanometers in width and 1 micrometer long) of controlled thickness and spacing. The structures obtained were imaged with field emission scanning electron microscopy. A variety of nanostructures could be scaled down, including structures with hollow patterns.