Details

Autor(en) / Beteiligte

• Vivien, Laurent
• Rouvière, Mathieu
• Fédéli, Jean-Marc
• Marris-Morini, Delphine
• Damlencourt, Jean François
• Mangeney, Juliette
• Crozat, Paul
• El Melhaoui, Loubna
• Cassan, Eric
• Le Roux, Xavier
• Pascal, Daniel
• Laval, Suzanne

Titel

High speed and high responsivity germanium photodetector integrated in a Silicon-On-Insulator microwaveguide

Ist Teil von

• Optics express, 2007-07, Vol.15 (15), p.9843-9848

Ort / Verlag

United States

Erscheinungsjahr

2007

Link zum Volltext

Quelle

Free E-Journal (出版社公開部分のみ）

Beschreibungen/Notizen

• We report the experimental demonstration of a germanium metal-semiconductor-metal (MSM) photodetector integrated in a SOI rib waveguide. Femtosecond pulse and frequency experiments have been used to characterize those MSM Ge photodetectors. The measured bandwidth under 6V bias is about 25 GHz at 1.55 microm wavelength with a responsivity as high as 1 A/W. The used technological processes are compatible with complementary-metal-oxide-semiconductor (CMOS) technology.