Details

Autor(en) / Beteiligte

• Fairchild, Barbara A.
• Olivero, Paolo
• Rubanov, Sergey
• Greentree, Andrew D.
• Waldermann, Felix
• Taylor, Robert A.
• Walmsley, Ian
• Smith, Jason M.
• Huntington, Shane
• Gibson, Brant C.
• Jamieson, David N.
• Prawer, Steven

Titel

Fabrication of Ultrathin Single-Crystal Diamond Membranes

Ist Teil von

• Advanced materials (Weinheim), 2008-12, Vol.20 (24), p.4793-4798

Ort / Verlag

Weinheim: WILEY-VCH Verlag

Erscheinungsjahr

2008

Quelle

Wiley Online Library

Beschreibungen/Notizen

• Sub‐micrometer layers of single‐crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double‐implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.