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Material defects such as Si-core and C-core partial dislocations (PDs) and threading screw
dislocations (TSDs) and threading edge dislocations (TEDs) are being investigated for their
contributions to device performances in 4H-SiC. Non-destructive electroluminescence and
photoluminescence techniques can be powerful tools for examining these dislocations. In this report,
these techniques were used to reveal the different spectral characteristics for the mentioned
dislocations. At higher injection levels, both the Si-core and C-core PDs possessed a spectral peak at
700 nm. However, at lower injection levels, the spectral peak for the Si-core PD remained at 700 nm
while the peak for the C-core moved to longer wavelengths. For the threading dislocations, TSDs
possessed a peak between 800 and 850 nm while the TEDs possessed a peak at 600 nm independent of
the injection levels.
Sprache
Englisch
Identifikatoren
ISSN: 0255-5476, 1662-9752
eISSN: 1662-9752
DOI: 10.4028/www.scientific.net/MSF.600-603.345
Titel-ID: cdi_proquest_miscellaneous_35331342
Format
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