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Single crystal ZnO nanowires diffused with europium (Eu) from a solid source at 900
°C for 1
h or doped with Eu during growth have been characterized. The ZnO nanowires were grown by chemical vapor deposition on Si substrates employing Au as a catalyst. The diameter of the resulting nanowires was ∼200
nm with a length of 1
μm. Photoluminescence spectra excited by a He–Cd laser at room temperature showed the green luminescence at 515
nm in Eu-diffused nanowires. A small red shift of near-band-edge emission of ZnO nanowires was observed in the diffused wires, but sharp emission from Eu
3 ions was not present. Transmission electron microscopy shows crystalline Eu
2O
3 formation on the diffused nanowire surface, which forms a coaxial heterostructure system. When Eu was incorporated during the nanowire growth, the sharp
5D
O–
7F
2 transition of the Eu
3+ ion at around 615
nm was observed.