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Nb-doped ZnO thin films have been prepared on glass substrates by pulsed laser deposition (PLD). The effect of substrate temperature has been investigated from 100 to 500
°C by analyzing the structural, optical, and electrical properties. The Nb-doped ZnO films possessed a good crystallinity with a
c-axis preferential orientation and a high transmittance (above 85%) in the visible region. The obtained film deposited at 350
°C exhibited the best electrical properties with the lowest room-temperature resistivity of around 5
×
10
−4
Ω
cm. Guided by x-ray photoemission spectroscopy analysis, Nb
Zn
3+ is believed to be the very possible donor in the Nb-doped ZnO films.