Details

Autor(en) / Beteiligte

• Brennecka, Geoff L.
• Parish, Chad M.
• Tuttle, Bruce A.
• Brewer, Luke N.
• Rodriguez, Mark A.

Titel

Reversibility of the Perovskite-to-Fluorite Phase Transformation in Lead-Based Thin and Ultrathin Films

Ist Teil von

• Advanced materials (Weinheim), 2008-04, Vol.20 (8), p.1407-1411

Ort / Verlag

Weinheim: WILEY-VCH Verlag

Erscheinungsjahr

2008

Quelle

Wiley Online Library - AutoHoldings Journals

Beschreibungen/Notizen

• As film thicknesses decrease below 50 nm, control of cation stoichiometry in Pb‐based dielectrics becomes increasingly difficult, a problem that is exacerbated by interaction with technologically important Pt bottom electrodes. Post‐crystallization annealing in a Pb‐rich atmosphere is shown to be a general technique to reversibly convert low‐permittivity Pb‐deficient fluorite into ferroelectric high‐permittivity stoichiometric perovskite with outstanding dielectric properties (see figure).