Physica status solidi. A, Applications and materials science, 2008-04, Vol.205 (4), p.715-719
2008
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Details
- Autor(en) / Beteiligte
- Titel
- Dielectric function representation by B-splines
- Ist Teil von
- Physica status solidi. A, Applications and materials science, 2008-04, Vol.205 (4), p.715-719
- Ort / Verlag
- Berlin: WILEY-VCH Verlag
- Erscheinungsjahr
- 2008
- Quelle
- Wiley Online Library - AutoHoldings Journals
- Beschreibungen/Notizen
- Accurate dielectric function values are essential for spectroscopic ellipsometry data analysis by traditional optical model‐based analysis techniques. In this paper, we show that B‐spline basis functions offer many advantages for param‐ eterizing dielectric functions. A Kramers–Kronig consistent B‐spline formulation, based on the standard B‐spline recursion relation, is derived. B‐spline representations of typical semiconductor and metal dielectric functions are also presented. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
- Sprache
- Englisch
- Identifikatoren
- ISSN: 1862-6300, 0031-8965eISSN: 1862-6319DOI: 10.1002/pssa.200777754Titel-ID: cdi_proquest_miscellaneous_32794283
- Format
- –
- Schlagworte
- 02.60.Ed, 02.60.Gf, 78.20.Bh, 78.20.Ci, Condensed matter: electronic structure, electrical, magnetic, and optical properties, Exact sciences and technology, General theory, Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation, Optical properties of bulk materials and thin films, Physics