Details

Autor(en) / Beteiligte

• You, Y.Z.
• Kim, Y.S.
• Choi, D.H.
• Jang, H.S.
• Lee, J.H.
• Kim, Daeil

Titel

Electrical and optical study of ITO films on glass and polymer substrates prepared by DC magnetron sputtering type negative metal ion beam deposition

Ist Teil von

• Materials chemistry and physics, 2008-02, Vol.107 (2), p.444-448

Ort / Verlag

Elsevier B.V

Erscheinungsjahr

2008

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• Transparent, conducting indium tin oxide (ITO) films were deposited without intentional substrate heating on glass and polyethersulfone (PES) substrates by a magnetron sputter type negative metal ion source (MSNIS). The effect of substrate type on optical transmittance, electrical resistivity, surface morphology and roughness of the ITO film was analyzed. ITO/glass substrates show a higher optical transmittance (89%) and lower resistivity (4 × 10 −4 Ω cm) than ITO/PES (78%, 6 × 10 −4 Ω cm). X-ray diffraction (XRD) spectra indicate polycrystalline ITO films deposited on glass and amorphous ITO films on PES. Atomic force microscopy (AFM) images also indicate that ITO/glass has a lower surface roughness than ITO/PES. The values of figure of merit ( T 10/ R sh) for ITO/glass ( ϕ TC = 7.7 × 10 −3 Ω −1) are higher than ITO/PES ( ϕ TC = 1.3 × 10 −3 Ω −1), indicating that ITO/glass achieved the best performance in this study.