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ZrSiN film was selected as diffusion barrier of titanium porcelain interface and sputtered on polished titanium substrate with RF reactive magnetron sputtering. XRD, XPS and TEM results revealed that the ZrSiN diffusion barrier is a nano-composite that consists of nano-crystallite ZrN and amorphous-like SiN
x phase. The results also showed that after simulated porcelain sintering thermocycles the surface of Ti substrate without ZrSiN diffusion barrier appears Ti oxide, however, the surface of Ti substrate with ZrSiN diffusion barrier appears no Ti oxides and only Zr, Si N and O. This proves that ZrSiN diffusion barrier protect the Ti substrate against oxidation during porcelain sintering. The results of three-point bending test also proved that ZrSiN diffusion barrier significantly improves the bonding strength between Ti substrate and porcelain. The ZrSiN diffusion barrier with higher Si content results in higher bonding strength of the Ti/porcelain. This indicates that amorphous Si–N phase of ZrSiN diffusion barrier improves its barrier property.