Journal of materials science, 2004-05, Vol.39 (9), p.3155-3157
2004
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Details
- Autor(en) / Beteiligte
- Titel
- Study of polymer humidity sensor array on silicon wafer
- Ist Teil von
- Journal of materials science, 2004-05, Vol.39 (9), p.3155-3157
- Ort / Verlag
- Heidelberg: Springer
- Erscheinungsjahr
- 2004
- Quelle
- Alma/SFX Local Collection
- Beschreibungen/Notizen
- In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance versus relative humidity (RH) at different frequencies.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0022-2461eISSN: 1573-4803DOI: 10.1023/B:JMSC.0000025847.52357.b8Titel-ID: cdi_proquest_miscellaneous_28427880