Details

Autor(en) / Beteiligte

• Law, V J
• Kenyon, A J
• Thornhill, N F
• Pagliarani, A
• Lea, L
• Watkins, M

Titel

A frequency domain measurement diagnostic technique for plasma-tools

Ist Teil von

• Measurement science & technology, 2004-01, Vol.15 (1), p.231-236

Ort / Verlag

IOP Publishing

Erscheinungsjahr

2004

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The design of a 10-500 MHz bridge is described and also its use with a tracking generator and spectrum analyser to form a scalar network analyser for the investigation of the internal electro-mechanical components of a parallel-plate and inductively-coupled plasma-tool. The non-invasive frequency scalar data obtained (with the plasma off) provides a frequency related registration of the internal components of the plasma-tool for given match network settings. Frequency data are presented for a parallel-plate chamber and a STS plc inductively-coupled plasma-tool as viewed via the lower electrode platen. Components identified relating to these chambers are the matching network, electrode position, wafer loading arm, wafer lift pin position and silicon wafer dislodgement. The data are used for comparing similar build configurations and fault conditions.