IEEE/ASME transactions on mechatronics, 2005-06, Vol.10 (3), p.335-338
2005
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Details
- Autor(en) / Beteiligte
- Titel
- A magnetically driven linear microactuator with new driving method
- Ist Teil von
- IEEE/ASME transactions on mechatronics, 2005-06, Vol.10 (3), p.335-338
- Ort / Verlag
- New York: IEEE
- Erscheinungsjahr
- 2005
- Quelle
- IEEE Electronic Library Online
- Beschreibungen/Notizen
- Electromagnetically driven microactuators are of interest because they have the potential to generate large deflections. Thus, we have been studying magnetically driven microactuators. This time, a magnetically driven linear microactuator has been newly developed by using microfabrication techniques. The microactuator is composed of a mobile microplatform (mover) with some permanent magnets (PMs) and a stator with a large number of planar coils. In this paper, two types of microplatforms are fabricated and compared with each other. Furthermore, static and dynamic characteristics of the magnetically driven linear microactuator are discussed.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 1083-4435eISSN: 1941-014XDOI: 10.1109/TMECH.2005.848294Titel-ID: cdi_proquest_miscellaneous_28063100
- Format
- –
- Schlagworte
- Coils, Deflection, Driving, Dynamic characteristics, Electromagnetic forces, Electrostatic actuators, Fabrication, Linear drive, linear PM motor, Lithography, magnetic attractive force, magnetic drive, Magnetic flux, Mechatronics, microactuator, Microactuators, Microcomputers, Permanent magnets, Signal generators, Stators