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Details

Autor(en) / Beteiligte
Titel
Single-crystalline van der Waals layered dielectric with high dielectric constant
Ist Teil von
  • Nature materials, 2023-07, Vol.22 (7), p.832-837
Ort / Verlag
England: Nature Publishing Group
Erscheinungsjahr
2023
Quelle
Nature Journals Online
Beschreibungen/Notizen
  • The scaling of silicon-based transistors at sub-ten-nanometre technology nodes faces challenges such as interface imperfection and gate current leakage for an ultrathin silicon channel . For next-generation nanoelectronics, high-mobility two-dimensional (2D) layered semiconductors with an atomic thickness and dangling-bond-free surfaces are expected as channel materials to achieve smaller channel sizes, less interfacial scattering and more efficient gate-field penetration . However, further progress towards 2D electronics is hindered by factors such as the lack of a high dielectric constant (κ) dielectric with an atomically flat and dangling-bond-free surface . Here, we report a facile synthesis of a single-crystalline high-κ (κ of roughly 16.5) van der Waals layered dielectric Bi SeO . The centimetre-scale single crystal of Bi SeO can be efficiently exfoliated to an atomically flat nanosheet as large as 250 × 200 μm and as thin as monolayer. With these Bi SeO nanosheets as dielectric and encapsulation layers, 2D materials such as Bi O Se, MoS and graphene show improved electronic performances. For example, in 2D Bi O Se, the quantum Hall effect is observed and the carrier mobility reaches 470,000 cm  V  s at 1.8 K. Our finding expands the realm of dielectric and opens up a new possibility for lowering the gate voltage and power consumption in 2D electronics and integrated circuits.

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