Japanese Journal of Applied Physics, 2003, Vol.42 (Part 1, No. 7A), p.4353-4356
2003
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Details
- Autor(en) / Beteiligte
- Titel
- Fabrication of a High-Throughput Cantilever-Style Aperture Tip by the Use of the Bird's-Beak Effect
- Ist Teil von
- Japanese Journal of Applied Physics, 2003, Vol.42 (Part 1, No. 7A), p.4353-4356
- Erscheinungsjahr
- 2003
- Quelle
- Alma/SFX Local Collection
- Beschreibungen/Notizen
- A fabrication technique for a high-throughput cantilever-style aperture tip is described. Using the bird's-beak effect due to the stress caused by Si3N4 film in the field oxidation of Si, authors fabricated a near-field aperture with a diameter of about 100 nm which has a throughput of more than 1000 times that of the pyramidal pit. 13 refs.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0021-4922eISSN: 1347-4065DOI: 10.1143/JJAP.42.4353Titel-ID: cdi_proquest_miscellaneous_27859506
- Format
- –