Sensors and actuators. A, Physical, 2003-09, Vol.106 (1-3), p.314-320
2003
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Details
- Autor(en) / Beteiligte
- Titel
- Micro-Hall devices: performance, technologies and applications
- Ist Teil von
- Sensors and actuators. A, Physical, 2003-09, Vol.106 (1-3), p.314-320
- Ort / Verlag
- Lausanne: Elsevier B.V
- Erscheinungsjahr
- 2003
- Quelle
- Alma/SFX Local Collection
- Beschreibungen/Notizen
- In this review paper, we summarize the performance (in particular the magnetic field resolution), micro-fabrication technologies and applications of micrometer sized Hall effect devices. Additionally, our activities in this domain are briefly described.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0924-4247eISSN: 1873-3069DOI: 10.1016/S0924-4247(03)00192-4Titel-ID: cdi_proquest_miscellaneous_27848940
- Format
- –
- Schlagworte
- Exact sciences and technology, General equipment and techniques, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Magnetic components, instruments and techniques, Magnetometers for magnetic field measurements, Micro-Hall devices, Physics, Scanning Hall probe microscopy, Sensors (chemical, optical, electrical, movement, gas, etc.), remote sensing