Details

Autor(en) / Beteiligte

• Tönshoff, H. K.
• Overmeyer, L.
• Ostendorf, Andreas
• Hesener, Hanno

Titel

NEW MACHINING CONCEPT FOR MANUFACTURING MICROSTRUCTURES WITH EXCIMER LASERS

Ist Teil von

• Machining science and technology, 1997-08, Vol.1 (1), p.153-162

Ort / Verlag

Taylor & Francis Group

Erscheinungsjahr

1997

Link zum Volltext

Quelle

Taylor & Francis

Beschreibungen/Notizen

• The manufacturing of microcomponents with excimer lasers, especially for small series and batch production, is an alternative to other established micromanufacturing methods associated with etch-technology. To avoid long nonproductive times, a general and flexible machining concept is presented, which is based on the mask projection of the excimer laser beam. Beginning the process chain with the workpiece design, a developed preprocessor is able to calculate the overall removal volume from computer-aided design (CAD) data and to break down into elementary volumes that are able to be processed with single laser pulses. Moreover, based on the restrictions of the excimer laser process, a set of NC data is generated to automatically start the production process. The reliability of the system is proven with different geometries such as micro-gear wheels and microlenses.