Details

Autor(en) / Beteiligte

• Chen, Guanyu
• Ng, Jun Da
• Lin, Hong-Lin
• Zhang, Gong
• Gong, Xiao
• Danner, Aaron J

Titel

Design and fabrication of high-performance multimode interferometer in lithium niobate thin film

Ist Teil von

• Optics express, 2021-05, Vol.29 (10), p.15689-15698

Ort / Verlag

United States

Erscheinungsjahr

2021

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• We propose and demonstrate a type of high-performance transverse magnetic (TM) multimode interferometer (MMI) in Z-cut thin film lithium niobate (TFLN). Both 1 × 2 and 4 × 4 MMI designs are demonstrated. Simulation results show that the insertion losses (ILs) are nominally about 0.157 and 0.297 dB for the 1 × 2 and 4 × 4 MMI, respectively, with wide fabrication tolerances. Based on the designed structure, the MMIs are fabricated using an argon based induced coupled plasma (ICP) etching method in Z-cut TFLN. The measured ILs are 0.268 and 0.63 dB for these two kinds of devices. The presented TM mode MMI featuring compact size and low loss can be used for both multifunctional devices and on-chip integrated circuits on a Z-cut TFLN platform.