Details

Autor(en) / Beteiligte

• Xia, Pengkun
• Zuo, Jiawei
• Paudel, Pravin
• Choi, Shinhyuk
• Chen, Xiahui
• Rahman Laskar, Md Ashiqur
• Bai, Jing
• Song, Weisi
• Im, JongOne
• Wang, Chao

Titel

Sapphire-supported nanopores for low-noise DNA sensing

Ist Teil von

• Biosensors & bioelectronics, 2021-02, Vol.174, p.112829-112829, Article 112829

Ort / Verlag

England: Elsevier B.V

Erscheinungsjahr

2021

Quelle

MEDLINE

Beschreibungen/Notizen

• Solid-state nanopores have broad applications from single-molecule biosensing to diagnostics and sequencing. The high capacitive noise from conventionally used conductive silicon substrates, however, has seriously limited both their sensing accuracy and recording speed. A new approach is proposed here for forming nanopore membranes on insulating sapphire wafers to promote low-noise nanopore sensing. Anisotropic wet etching of sapphire through micro-patterned triangular masks is used to demonstrate the feasibility of scalable formation of small (<25 μm) membranes with a size deviation of less than 7 μm over two 2-inch wafers. For validation, a sapphire-supported (SaS) nanopore chip with a 100 times larger membrane area than conventional nanopores was tested, which showed 130 times smaller capacitance (10 pF) and 2.6 times smaller root-mean-square (RMS) noise current (18–21 pA over 100 kHz bandwidth, with 50–150 mV bias) when compared to a silicon-supported (SiS) nanopore (~1.3 nF, and 46–51 pA RMS noise). Tested with 1k base-pair double-stranded DNA, the SaS nanopore enabled sensing at microsecond speed with a signal-to-noise ratio of 21, compared to 11 from a SiS nanopore. This SaS nanopore presents a manufacturable nanoelectronic platform feasible for high-speed and low-noise sensing of a variety of biomolecules. •A new approach to create triangular membranes and nanopores on crystalline sapphire wafers.•Reduced capacitance and high-frequency noise for high-speed and low-noise sensing.•Batch-processing compatible and wafer-scale fabrication of nanopore membranes.•Controllable fabrication of triangular shaped membranes as small as ~1 μm.•Noise performance comparable with state-of-art low-noise nanopore chips.