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A slim beam deflector that satisfies both a large steering angle and a large area can be very useful in various applications. However, a smaller electrode pitch for a large steering angle and enlargement of its area are trade-off relations due to the limited number of control channels in an electrically tunable beam deflector system. For a large steering angle in the active area where actual diffraction occurs, an indium tin oxide electrode of 2 µm pitch was implemented through a stepper lithography. The via-hole process was developed to expand the reduced active area due to the small electrode pitch. We developed a beam deflector with 7200 controllable channels in an active area of 14.4 m m × 14.4 m m . The maximum steering angle is 7.643° at a wavelength of 532 nm.
Sprache
Englisch
Identifikatoren
ISSN: 1559-128X
eISSN: 2155-3165
DOI: 10.1364/AO.398863
Titel-ID: cdi_crossref_primary_10_1364_AO_398863
Format
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