Details

Autor(en) / Beteiligte

• Shi, Kai
• Su, Junhong
• Hou, Wenmei

Titel

Roll angle measurement system based on differential plane mirror interferometer

Ist Teil von

• Optics express, 2018-08, Vol.26 (16), p.19826-19834

Ort / Verlag

United States

Erscheinungsjahr

2018

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• A precision roll angle measurement system based on differential plane mirror interferometer (DPMI) is proposed and the measurement principle has been analyzed theoretically in detail. This system uses DPMI with wedgy angle prism and wedgy angle reflector to produce diagonal symmetry of the two frequency beams. The residual of nanopositioning stage and roll angle system is less than 1 μrad, which has verified the correctness of the measuring principle. As result, the stability of the roll angle measurement system is satisfactory, and the average deviation of measurement experiments is less than 5 μrad.