Details

Autor(en) / Beteiligte

• Kim, Kyunghwan
• Song, Yunwon
• Oh, Jungwoo

Titel

Nano/micro dual-textured antireflective subwavelength structures in anisotropically etched GaAs

Ist Teil von

• Optics letters, 2017-08, Vol.42 (16), p.3105-3108

Ort / Verlag

United States

Erscheinungsjahr

2017

Quelle

OSA_美国光学学会数据库1

Beschreibungen/Notizen

• Light trapping by surface texturing is widely used to improve the performance of optoelectronic devices. In this Letter, we demonstrate nano/micro dual-scale textured GaAs by integrating triangular GaAs by orientation-dependent wet etching and subwavelength nanoholes by metal-assisted chemical etching (MacEtch). This is the first report on nano/micro dual-scale textured GaAs. The reflectance was adjusted by controlling the aspect ratio of the nanoholes by varying the MacEtch duration. The combination of the microstructure and subwavelength structures significantly reduced the solar-weighted reflectance of a bare GaAs substrate by 72%.