Details

Autor(en) / Beteiligte

• Jia, Hao
• Yang, Rui
• Nguyen, Ariana E
• Alvillar, Sahar Naghibi
• Empante, Thomas
• Bartels, Ludwig
• Feng, Philip X-L

Titel

Large-scale arrays of single- and few-layer MoS sub(2) nanomechanical resonators

Ist Teil von

• Nanoscale, 2016-05, Vol.8 (20), p.10677-10685

Erscheinungsjahr

2016

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• We report the fabrication of large-scale arrays of suspended molybdenum disulfide (MoS sub(2)) atomic layers, as two-dimensional (2D) MoS sub(2) nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS sub(2) atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS sub(2) drumhead resonators (0.5-2 mu m in diameter) offer fundamental resonances (f sub(0)) in the very high frequency (VHF) band (up to similar to 120 MHz) and excellent figures-of-merit up to f sub(0) Q approximately 3 10 super(10) Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically similar to 15 mN m super(-1) in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS sub(2) crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.