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Details

Autor(en) / Beteiligte
Titel
Large-scale arrays of single- and few-layer MoS sub(2) nanomechanical resonators
Ist Teil von
  • Nanoscale, 2016-05, Vol.8 (20), p.10677-10685
Erscheinungsjahr
2016
Quelle
Alma/SFX Local Collection
Beschreibungen/Notizen
  • We report the fabrication of large-scale arrays of suspended molybdenum disulfide (MoS sub(2)) atomic layers, as two-dimensional (2D) MoS sub(2) nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS sub(2) atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS sub(2) drumhead resonators (0.5-2 mu m in diameter) offer fundamental resonances (f sub(0)) in the very high frequency (VHF) band (up to similar to 120 MHz) and excellent figures-of-merit up to f sub(0) Q approximately 3 10 super(10) Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically similar to 15 mN m super(-1) in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS sub(2) crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.
Sprache
Englisch
Identifikatoren
ISSN: 2040-3364
eISSN: 2040-3372
DOI: 10.1039/c6nr01118g
Titel-ID: cdi_proquest_miscellaneous_1816042184

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