Details

Autor(en) / Beteiligte

• Fong, King Y.
• Pernice, Wolfram H. P.
• Tang, Hong X.

Titel

Frequency and phase noise of ultrahigh Q silicon nitride nanomechanical resonators

Ist Teil von

• Physical review. B, Condensed matter and materials physics, 2012-04, Vol.85 (16), Article 161410

Erscheinungsjahr

2012

Link zum Volltext

Quelle

American Physical Society [PROLA]

Beschreibungen/Notizen

• We describe the measurement and modeling of amplitude noise and phase noise in ultrahigh Q nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators' noise performance is studied with high precision. We find that the amplitude noise can be well described by the thermomechanical model, however, the resonators exhibit sizable extra phase noise due to their intrinsic frequency fluctuations. We develop a method to extract the resonator frequency fluctuation of a driven resonator and obtain a noise spectrum with k sub(B) T/[functionof] dependence, which could be attributed to defect motion with broadly distributed relaxation times.