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In this work the effect of Si addition on the mechanical properties and the high temperature oxidation resistance of TiB2 coatings is investigated. Nanocrystalline Ti–B–Si coatings were prepared by magnetron sputtering using co-deposition from TiB2 and Si targets. Si addition causes decrease of hardness and effective Young's elastic modulus of the coating. Annealing in high vacuum increases the content of crystalline TiB2 phase that in turn leads to enhanced hardness. High resolution thermogravimetry together with x-ray diffraction (XRD), electron probe microanalysis (EPMA), x-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) is used to investigate the processes associated with exposure to air at elevated temperatures. The formation of nanocrystalline Ti–Si–O oxide scale after exposure to air at 500°C is related to B2O3 release. Increased Si content suppresses the growth of crystal phase and contributes to the high temperature oxidation resistance. At 800°C the oxidized scale formed the layered structure of globular TiO2, columnar TiO2 and amorphous borosilicate.
•Si addition in Ti–B–Si coatings improves their oxidation resistance.•Dense Ti–Si–O oxide scale is formed after annealing in air at ~500°C.•After annealing in air at 800°C the oxide scale has layered cross-sectional morphology.•Si addition in Ti–B–Si decreases the coating hardness and elastic modulus.•Annealing in high vacuum increases hardness of Ti–B–Si coating.