Details

Autor(en) / Beteiligte

• Zimmermann, F.
• Plech, A.
• Richter, S.
• Döring, S.
• Tünnermann, A.
• Nolte, S.

Titel

Structural evolution of nanopores and cracks as fundamental constituents of ultrashort pulse-induced nanogratings

Ist Teil von

• Applied physics. A, Materials science & processing, 2014, Vol.114 (1), p.75-79

Ort / Verlag

Berlin/Heidelberg: Springer Berlin Heidelberg

Erscheinungsjahr

2014

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• We present an extensive study of the underlying structure of femtosecond laser-induced nanogratings in fused silica. To explore the evolution of the three-dimensional structure of the nanopores and cracks, of which the nanogratings consist, we performed small angle X-ray scattering measurements as well as focused ion beam milling and scanning electron microscopy. Our results show that cracks with dimensions of (280  ×  25  ×  380) nm 3 and nanopores with typical diameters of (30  ×  25  ×  75) nm 3 are formed independent of various illumination parameters. With increasing number of laser pulses the smaller pores fuse to larger structures. Furthermore, the data suggest a cross-sectional change of the pores from cuboidal to ellipsoidal.