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To study the interactions between picosecond soft x-ray laser (SXRL) beams and material surfaces, gold (Au), copper (Cu), and silicon (Si) surfaces were irradiated with SXRL pulses having a wavelength of 13.9 nm and a duration of ∼7 ps. Following irradiation, the surfaces of the substrates were observed using a scanning electron microscope and an atomic force microscope. With single pulse irradiation, ripple-like structures were formed on the Au and Cu surfaces. These structures were different from previously investigated conical structures formed on an Al surface. In addition, it was confirmed that the development of modified structures, i.e., growth of hillocks on the Au and Cu surfaces, was observed after multiple SXRL pulse exposures. However, on the Si surface, deep holes that seemed to be melted structures induced by the accumulation of multiple pulses of irradiations were found. Therefore, it was concluded that SXRL beam irradiation of various material surfaces causes different types of surface modifications, and the changes in the surface behaviors are attributed to the differences in the elemental properties, such as the attenuation length of x-ray photons.