Applied physics. B, Lasers and optics, 2005, Vol.80 (1), p.27-30
2005
Volltextzugriff (PDF)
Details
- Autor(en) / Beteiligte
- Titel
- 100-kHz diffraction-limited femtosecond laser micromachining
- Ist Teil von
- Applied physics. B, Lasers and optics, 2005, Vol.80 (1), p.27-30
- Ort / Verlag
- Berlin: Springer
- Erscheinungsjahr
- 2005
- Quelle
- SpringerLink
- Beschreibungen/Notizen
- We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to {/content/BGCK7GJ697YXL737/xxlarge955.gif}/15 peak--valley and {/content/BGCK7GJ697YXL737/xxlarge955.gif}/100 rms. Clean 1.7-{/content/BGCK7GJ697YXL737/xxlarge956.gif}m diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0946-2171eISSN: 1432-0649DOI: 10.1007/s00340-004-1697-xTitel-ID: cdi_proquest_miscellaneous_1283682334
- Format
- –
- Schlagworte
- Beam characteristics: profile, intensity, and power, spatial pattern formation, Beams (radiation), Biological and medical applications, Diffraction, Distortion, Exact sciences and technology, Femtosecond, Fundamental areas of phenomenology (including applications), High speed, Industrial applications, Laser optical systems: design and operation, Lasers, Micromachining, Modulators, Optics, Physics