Details

Autor(en) / Beteiligte

• ROCH, T
• DOBROCKA, E
• KUS, P
• MIKULA, M
• PIDIK, A
• DURINA, P
• HAIDRY, A. A
• PLECENIK, T
• TRUCHLY, M
• GRANCIC, B
• PLECENIK, A

Titel

Strong biaxial texture and polymorph nature in TiO2 thin film formed by ex-situ annealing on c-plane Al2O3 surface

Ist Teil von

• Journal of crystal growth, 2012, Vol.338 (1), p.118-124

Ort / Verlag

Amsterdam: Elsevier

Erscheinungsjahr

2012

Quelle

Elsevier ScienceDirect Journals

Beschreibungen/Notizen

• Many applications based on TiO2 thin films are strongly influenced by the film crystalline quality, microstructure and surface morphology. We have utilized x-ray scattering methods for crystal structure study of TiO2 films, grown by DC reactive magnetron sputtering without heating. We have observed the formation of ordered phases after post-deposition ex-situ annealing in air at 600 degree C. The distinct biaxial texture with respect to the c-plane (0001) Al2O3 substrate surface, which developed during heating, shows remarkable patterns in pole figures. We have identified epitaxial relationships of anatase A(001)[110][Verbar]sub(001)[11I"00] and rutile R(100)[001][Verbar]sub(0001)[100] within single TiO2 layer. In addition, within the same sample, we have observed the anatase in (112) orientation with two in-plane relationship options A(112)[11I"0][Verbar]sub(0001)[21I"1I"0] and A(112)[11I"0]a-sub(0001)[11I"00].