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To avoid large angle grain boundaries in YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) thin films, biaxially textured buffer layers were grown by inclined substrate deposition. We use MgO as buffer layer material, which can be grown at rates up to 300 mm/min using either e-beam evaporation of MgO or reactive thermal evaporation of magnesium. Employed substrates were Hastelloy C276 or stainless steel. Epitaxial YBCO was grown on these buffer layers by thermal co-evaporation. We reached YBCO in plane texture of 7/spl deg/ FWHM and critical currents along tape direction of 84 A on tapes with 8 mn width and 1.8 /spl mu/m YBCO thickness which means a current density of 0.58 MA/cm/sup 2/.