Details

Autor(en) / Beteiligte

• Phung, Thanh Hoa
• Steinmann, Philipp
• Wise, Rick
• Yeo, Yee-Chia
• Zhu, Chunxiang

Titel

Modeling the Negative Quadratic VCC of [Formula Omitted] in MIM Capacitor

Ist Teil von

• IEEE electron device letters, 2011-12, Vol.32 (12), p.1671

Ort / Verlag

New York: The Institute of Electrical and Electronics Engineers, Inc. (IEEE)

Erscheinungsjahr

2011

Link zum Volltext

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• The electrical performance of metal-insulator-metal capacitors with [Formula Omitted] thicknesses from 3 to 13 nm was investigated. The magnitude of the negative quadratic voltage coefficient of capacitance (VCC) [Formula Omitted] of [Formula Omitted] was found to be inversely proportional to the square of its thickness. A postdeposition anneal at 400 [Formula Omitted] reduced [Formula Omitted] substantially. An equation based on the orientation polarization of the dipole moments in [Formula Omitted] was derived, which fits the measured normalized capacitance density versus voltage across [Formula Omitted] very well. This suggests that the negative quadratic VCC of [Formula Omitted] is due to the orientation polarization.